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|a Etching of Si(100)-2 x 1 with chlorine
|b Reaction pathways, energy anisotropies, and atomic-scale phenomena
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| 264 |
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|c 1995
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| 336 |
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|a Text
|b txt
|2 rdacontent
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|a ohne Hilfsmittel zu benutzen
|b n
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|a Date Revised 20.11.2019
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|a published: Print
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|a Citation Status PubMed-not-MEDLINE
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|a Journal Article
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|i Enthalten in
|t Physical review. B, Condensed matter
|d 1985
|g 52(1995), 11 vom: 15. Sept., Seite 8288-8294
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|x 0163-1829
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