Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry

par Mattinen, Miika
Publié dans: Chemistry of materials : a publication of the American Chemical Society (2022)

Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2

par Arts, Karsten
Publié dans: Chemistry of materials : a publication of the American Chemical Society (2021)

Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition

par Basuvalingam, Saravana Balaji
Publié dans: Chemistry of materials : a publication of the American Chemical Society (2019)

Bottom-Up Grown 2D InSb Nanostructures

par Gazibegovic, Sasa
Publié dans: Advanced materials (Deerfield Beach, Fla.) (2019)

Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution

par Balasubramanyam, Shashank
Publié dans: Chemistry of materials : a publication of the American Chemical Society (2019)

Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography

par Wu, Yizhi
Publié dans: Chemistry of materials : a publication of the American Chemical Society (2018)

Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization

par Vervuurt, René H J
Publié dans: Chemistry of materials : a publication of the American Chemical Society (2017)

Rationally designed single-crystalline nanowire networks

par Car, Diana
Publié dans: Advanced materials (Deerfield Beach, Fla.) (2014)