The Influence of Additives on the Interfacial Width and Line Edge Roughness in Block Copolymer Lithography

von Sunday, Daniel F
Veröffentlicht in: Chemistry of materials : a publication of the American Chemical Society (2020)

X-ray characterization of contact holes for block copolymer lithography

von Sunday, Daniel F
Veröffentlicht in: Journal of applied crystallography (2019)

Modeling the polarized X-ray scattering from periodic nanostructures with molecular anisotropy

von Liman, Christopher D
Veröffentlicht in: Journal of applied crystallography (2017)