Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers

von Bozkurt, A
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (1999)

Surface micromachined capacitive ultrasonic transducers

von Ladabaum, I
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (1998)