Surface micromachined capacitive ultrasonic transducers
The current state of novel technology, surface microfabricated ultrasonic transducers, is reported. Experiments demonstrating both air and water transmission are presented. Air-coupled longitudinal wave transmission through aluminum is demonstrated, implying a 110 dB dynamic range for transducers at...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 45(1998), 3 vom: 15., Seite 678-90
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| 1. Verfasser: |
Ladabaum, I
(VerfasserIn) |
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| Weitere Verfasser: |
Jin, X,
Soh, H T,
Atalar, A,
Khuri-Yakub, B T |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
1998
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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