Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers
Theoretical analysis and computer simulations of capacitive microfabricated ultrasonic transducers indicate that device performance can be optimized through judicious patterning of electrodes. The conceptual basis of the analysis is that electrostatic force should be applied only where it is most ef...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 46(1999), 6 vom: 15., Seite 1364-74
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| 1. Verfasser: |
Bozkurt, A
(VerfasserIn) |
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| Weitere Verfasser: |
Ladabaum, I,
Atalar, A,
Khuri-Yakub, B T |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
1999
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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