Micromachined thin film plate acoustic wave resonators (FPAR) Part II

von Yantchev, Ventsislav
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2009)

Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric lamb wave mode

von Yantchev, Ventsislav
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2007)

Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators

von Bjurström, Johan
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2006)

Suppression of spurious lateral modes in thickness-excited FBAR resonators

von Rosén, Daniel
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2005)

Synthesis of C-axis-oriented AlN thin films on high-conducting layers Al, Mo, Ti, TiN, and Ni

von Iriarte, Gonzalo F
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2005)

SAW COM-parameter extraction in AlN/diamond layered structures

von Iriarte, Gonzalo F
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2003)