Micromachined thin film plate acoustic wave resonators (FPAR) : Part II
Improved performance thin-film plate acoustic wave resonators (FPAR) using the lowest order symmetric Lamb wave (S0) propagating in highly textured AlN membranes have been previously demonstrated for the first time. In this work, an experimental study of the resonators' performance vs. a variet...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 56(2009), 12 vom: 19. Dez., Seite 2701-10
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| 1. Verfasser: |
Yantchev, Ventsislav
(VerfasserIn) |
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| Weitere Verfasser: |
Arapan, Lilia,
Katardjiev, Ilia |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2009
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
Membranes, Artificial |
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