Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators

von Bjurström, Johan
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2006)

Synthesis of C-axis-oriented AlN thin films on high-conducting layers Al, Mo, Ti, TiN, and Ni

von Iriarte, Gonzalo F
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2005)

Suppression of spurious lateral modes in thickness-excited FBAR resonators

von Rosén, Daniel
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2005)