Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric lamb wave mode
Thin film integrated circuits compatible resonant structures using the lowest order symmetric Lamb wave propagating in thin aluminum nitride (AlN) film membranes have been studied. The 2-microm thick, highly coriented AlN piezoelectric films have been grown on silicon by pulsed, direct-current magne...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 54(2007), 1 vom: 16. Jan., Seite 87-95 |
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| Format: | Aufsatz |
| Sprache: | English |
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2007
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article Research Support, Non-U.S. Gov't Membranes, Artificial |