Study on Lapping Mechanism of Different Crystal Planes of Indium Phosphide : Molecular Dynamics Simulation and Experimental Verification
The unknown mechanism of lapping damage on different InP crystal surfaces constrains the device performance optimization. This study establishes a molecular dynamics (MD) model for nanoscale lapping of InP (100)/(110)/(111) surfaces using the Vashishta potential, combined with gradient lapping exper...
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Détails bibliographiques
| Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 41(2025), 35 vom: 09. Sept., Seite 23850-23866
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| Auteur principal: |
Wen, Xiaoning
(Auteur) |
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| Autres auteurs: |
Deng, Jiayun,
Bai, Zilei,
Geng, Jiacheng,
Wei, Hua,
Liu, Hanbao,
Qiu, Feng,
Hui, Feng |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2025
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| Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids
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| Sujets: | Journal Article |
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