Overlap junctions for high coherence superconducting qubits

Fabrication of sub-micron Josephson junctions is demonstrated using standard processing techniques for high-coherence, superconducting qubits. These junctions are made in two separate lithography steps with normal-angle evaporation. Most significantly, this work demonstrates that it is possible to a...

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Détails bibliographiques
Publié dans:Applied physics letters. - 1998. - 111(2017), 3 vom: 12. Juli
Auteur principal: Wu, X (Auteur)
Autres auteurs: Long, J L, Ku, H S, Lake, R E, Bal, M, Pappas, D P
Format: Article en ligne
Langue:English
Publié: 2017
Accès à la collection:Applied physics letters
Sujets:Journal Article 03.67.Lx