Overlap junctions for high coherence superconducting qubits
Fabrication of sub-micron Josephson junctions is demonstrated using standard processing techniques for high-coherence, superconducting qubits. These junctions are made in two separate lithography steps with normal-angle evaporation. Most significantly, this work demonstrates that it is possible to a...
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Détails bibliographiques
Publié dans: | Applied physics letters. - 1998. - 111(2017), 3 vom: 12. Juli
|
Auteur principal: |
Wu, X
(Auteur) |
Autres auteurs: |
Long, J L,
Ku, H S,
Lake, R E,
Bal, M,
Pappas, D P |
Format: | Article en ligne
|
Langue: | English |
Publié: |
2017
|
Accès à la collection: | Applied physics letters
|
Sujets: | Journal Article
03.67.Lx |