Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings
© Ksenia Matveevskii et al. 2024.
| Veröffentlicht in: | Journal of applied crystallography. - 1998. - 57(2024), Pt 5 vom: 01. Okt., Seite 1288-1298 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , , , , , , , |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2024
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| Zugriff auf das übergeordnete Werk: | Journal of applied crystallography |
| Schlagworte: | Journal Article X-ray standing waves grazing-incidence X-ray fluorescence laboratory metrology many-beam dynamical diffraction theory |
| Zusammenfassung: | © Ksenia Matveevskii et al. 2024. The increasing structural complexity and downscaling of modern nanodevices require continuous development of structural characterization techniques that support R&D and manufacturing processes. This work explores the capability of laboratory characterization of periodic planar nanostructures using 3D X-ray standing waves as a promising method for reconstructing atomic profiles of planar nanostructures. The non-destructive nature of this metrology technique makes it highly versatile and particularly suitable for studying various types of samples. Moreover, it eliminates the need for additional sample preparation before use and can achieve sub-nanometre reconstruction resolution using widely available laboratory setups, as demonstrated on a diffractometer equipped with a microfocus X-ray tube with a copper anode |
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| Beschreibung: | Date Revised 11.10.2024 published: Electronic-eCollection Citation Status PubMed-not-MEDLINE |
| ISSN: | 0021-8898 |
| DOI: | 10.1107/S1600576724007179 |