Flexible PZT-based Row-Column Addressed 2D PMUT Array
This paper reports a 30×12 row-column (RC) addressed flexible piezoelectric micromachined ultrasound transducer (PMUT) array with a top-down fabrication process. The fabrication uses a temporary carrier wafer from which the array device is released by deep reactive ion etching (DRIE). About 0.8 μm t...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - PP(2024) vom: 23. Sept. |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2024
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |
| Online verfügbar |
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