Large-Area Growth of Ferroelectric 2D γ-In2 Se3 Semiconductor by Spray Pyrolysis for Next-Generation Memory

© 2023 Wiley-VCH GmbH.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 36(2024), 4 vom: 24. Jan., Seite e2308301
1. Verfasser: Lim, Taebin (VerfasserIn)
Weitere Verfasser: Lee, Jae Heon, Kim, Donggyu, Bae, Jinbaek, Jung, Seungchae, Yang, Sang Mo, Jang, Joon I, Jang, Jin
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2024
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article ferroelectric-semiconductor field effect transistor indium selenide large-area growth memory spray pyrolysis deposition
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520 |a In2 Se3 , 2D ferroelectric-semiconductor, is a promising candidate for next-generation memory device because of its outstanding electrical properties. However, the large-area manufacturing of In2 Se3 is still a big challenge. In this work, spray pyrolysis technique is introduced for the growth of large-area In2 Se3 thin film. A polycrystalline γ-In2 Se3 layer can be grown on 15 cm × 15 cm glasss at the substrate temperature of 275 °C. The In2 Se3 ferroelectric-semiconductor field effect transistor (FeS-FET) on glass substrate demonstrates a large hysteresis window of 40.3 V at the ±40 V of gate voltage sweep and excellent uniformity. The FeS-FET exhibits an electron field effect mobility of 0.97 cm2 V-1 s-1 and an on/off current ratio of >107 in the transfer curves. The memory behavior of the large-area, In2 Se3 FeS-FETs for next-generation memory is demonstrated 
650 4 |a Journal Article 
650 4 |a ferroelectric-semiconductor field effect transistor 
650 4 |a indium selenide 
650 4 |a large-area growth 
650 4 |a memory 
650 4 |a spray pyrolysis deposition 
700 1 |a Lee, Jae Heon  |e verfasserin  |4 aut 
700 1 |a Kim, Donggyu  |e verfasserin  |4 aut 
700 1 |a Bae, Jinbaek  |e verfasserin  |4 aut 
700 1 |a Jung, Seungchae  |e verfasserin  |4 aut 
700 1 |a Yang, Sang Mo  |e verfasserin  |4 aut 
700 1 |a Jang, Joon I  |e verfasserin  |4 aut 
700 1 |a Jang, Jin  |e verfasserin  |4 aut 
773 0 8 |i Enthalten in  |t Advanced materials (Deerfield Beach, Fla.)  |d 1998  |g 36(2024), 4 vom: 24. Jan., Seite e2308301  |w (DE-627)NLM098206397  |x 1521-4095  |7 nnns 
773 1 8 |g volume:36  |g year:2024  |g number:4  |g day:24  |g month:01  |g pages:e2308301 
856 4 0 |u http://dx.doi.org/10.1002/adma.202308301  |3 Volltext 
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