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231226s2023 xx |||||o 00| ||eng c |
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|a 10.1002/adma.202306715
|2 doi
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|a pubmed24n1240.xml
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|a (DE-627)NLM362188106
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|a (NLM)37721970
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|a DE-627
|b ger
|c DE-627
|e rakwb
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|a eng
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| 100 |
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|a Wu, Binmin
|e verfasserin
|4 aut
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|a Self-Rolled-Up Ultrathin Single-Crystalline Silicon Nanomembranes for On-Chip Tubular Polarization Photodetectors
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|c 2023
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|a Text
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|a ƒaComputermedien
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|2 rdamedia
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|a ƒa Online-Ressource
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|2 rdacarrier
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|a Date Revised 27.12.2023
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a © 2023 Wiley-VCH GmbH.
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|a Freestanding single-crystalline nanomembranes and their assembly have broad application potential in photodetectors for integrated chips. However, the release and self-assembly process of single-crystalline semiconductor nanomembranes still remains a great challenge in on-chip processing and functional integration, and photodetectors based on nanomembrane always suffer from limited absorption of nanoscale thickness. Here, a non-destructive releasing and rolling process is employed to prepare tubular photodetectors based on freestanding single-crystalline Si nanomembranes. Spontaneous release and self-assembly are achieved by residual strain introduced by lattice mismatch at the epitaxial interface of Si and Ge, and the intrinsic stress and strain distributions in self-rolled-up Si nanomembranes are analyzed experimentally and computationally. The advantages of light trapping and wide-angle optical coupling are realized by tubular geometry. This Si microtube device achieves reliable Ohmic contact and exhibits a photoresponsivity of over 330 mA W-1 , a response time of 370 µs, and a light incident detection angle range of over 120°. Furthermore, the microtubular structure shows a distinct polarization angle-dependent light absorption, with a dichroic ratio of 1.24 achieved at 940 nm. The proposed Si-based microtubes provide new possibilities for the construction of multifunctional chips for integrated circuit ecosystems in the More than Moore era
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|a Journal Article
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|a photodetectors
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|a polarization-sensitivity
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|a self-rolled-up microtubes
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|a single-crystalline Si nanomembranes
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|a Zhang, Ziyu
|e verfasserin
|4 aut
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1 |
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|a Zheng, Zhi
|e verfasserin
|4 aut
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1 |
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|a Cai, Tianjun
|e verfasserin
|4 aut
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1 |
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|a You, Chunyu
|e verfasserin
|4 aut
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|a Liu, Chang
|e verfasserin
|4 aut
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|a Li, Xing
|e verfasserin
|4 aut
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|a Wang, Yang
|e verfasserin
|4 aut
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|a Wang, Jinlong
|e verfasserin
|4 aut
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|a Li, Hongbin
|e verfasserin
|4 aut
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| 700 |
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|a Song, Enming
|e verfasserin
|4 aut
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|a Cui, Jizhai
|e verfasserin
|4 aut
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|a Huang, Gaoshan
|e verfasserin
|4 aut
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|a Mei, Yongfeng
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t Advanced materials (Deerfield Beach, Fla.)
|d 1998
|g 35(2023), 52 vom: 16. Dez., Seite e2306715
|w (DE-627)NLM098206397
|x 1521-4095
|7 nnns
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| 773 |
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|g volume:35
|g year:2023
|g number:52
|g day:16
|g month:12
|g pages:e2306715
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|u http://dx.doi.org/10.1002/adma.202306715
|3 Volltext
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|d 35
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