Temperature-Dependent Friction-Induced Surface Amorphization Mechanism of Crystal Silicon
Friction-induced surface amorphization of silicon is one of the most important surface wear and damage forms, changing the material properties and harming the reliability of silicon-based devices. However, knowledge regarding the amorphization mechanisms as well as the effects of temperature is stil...
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Détails bibliographiques
Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 39(2023), 37 vom: 19. Sept., Seite 13222-13227
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Auteur principal: |
Qin, Jie
(Auteur) |
Autres auteurs: |
Jiang, Yilong,
Dang, Shehui,
Qian, Linmao,
Chen, Lei,
Wang, Yang |
Format: | Article en ligne
|
Langue: | English |
Publié: |
2023
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Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids
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Sujets: | Journal Article |