Temperature-Dependent Friction-Induced Surface Amorphization Mechanism of Crystal Silicon
Friction-induced surface amorphization of silicon is one of the most important surface wear and damage forms, changing the material properties and harming the reliability of silicon-based devices. However, knowledge regarding the amorphization mechanisms as well as the effects of temperature is stil...
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Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 39(2023), 37 vom: 19. Sept., Seite 13222-13227
|
| 1. Verfasser: |
Qin, Jie
(VerfasserIn) |
| Weitere Verfasser: |
Jiang, Yilong,
Dang, Shehui,
Qian, Linmao,
Chen, Lei,
Wang, Yang |
| Format: | Online-Aufsatz
|
| Sprache: | English |
| Veröffentlicht: |
2023
|
| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
|
| Schlagworte: | Journal Article |