Temperature-Dependent Friction-Induced Surface Amorphization Mechanism of Crystal Silicon

Friction-induced surface amorphization of silicon is one of the most important surface wear and damage forms, changing the material properties and harming the reliability of silicon-based devices. However, knowledge regarding the amorphization mechanisms as well as the effects of temperature is stil...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1985. - 39(2023), 37 vom: 19. Sept., Seite 13222-13227
1. Verfasser: Qin, Jie (VerfasserIn)
Weitere Verfasser: Jiang, Yilong, Dang, Shehui, Qian, Linmao, Chen, Lei, Wang, Yang
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2023
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article