Temperature-Dependent Friction-Induced Surface Amorphization Mechanism of Crystal Silicon
Friction-induced surface amorphization of silicon is one of the most important surface wear and damage forms, changing the material properties and harming the reliability of silicon-based devices. However, knowledge regarding the amorphization mechanisms as well as the effects of temperature is stil...
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Bibliographische Detailangaben
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 39(2023), 37 vom: 19. Sept., Seite 13222-13227
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1. Verfasser: |
Qin, Jie
(VerfasserIn) |
Weitere Verfasser: |
Jiang, Yilong,
Dang, Shehui,
Qian, Linmao,
Chen, Lei,
Wang, Yang |
Format: | Online-Aufsatz
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Sprache: | English |
Veröffentlicht: |
2023
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Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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Schlagworte: | Journal Article |