Mold-Free Manufacturing of Highly Sensitive and Fast-Response Pressure Sensors Through High-Resolution 3D Printing and Conformal Oxidative Chemical Vapor Deposition Polymers

© 2023 The Authors. Advanced Materials published by Wiley-VCH GmbH.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 35(2023), 41 vom: 01. Okt., Seite e2304070
1. Verfasser: Baek, Jinwook (VerfasserIn)
Weitere Verfasser: Shan, Yujie, Mylvaganan, Mitesh, Zhang, Yuxuan, Yang, Xixian, Qin, Fei, Zhao, Kejie, Song, Han Wook, Mao, Huachao, Lee, Sunghwan
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2023
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article 3D printing chemical vapor deposition conductive polymers mold-free pressure sensors ultrafast response
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520 |a A new manufacturing paradigm is showcased to exclude conventional mold-dependent manufacturing of pressure sensors, which typically requires a series of complex and expensive patterning processes. This mold-free manufacturing leverages high-resolution 3D-printed multiscale microstructures as the substrate and a gas-phase conformal polymer coating technique to complete the mold-free sensing platform. The array of dome and spike structures with a controlled spike density of a 3D-printed substrate ensures a large contact surface with pressures applied and extended linearity in a wider pressure range. For uniform coating of sensing elements on the microstructured surface, oxidative chemical vapor deposition is employed to deposit a highly conformal and conductive sensing element, poly(3,4-ethylenedioxythiophene) at low temperatures (<60 °C). The fabricated pressure sensor reacts sensitively to various ranges of pressures (up to 185 kPa-1 ) depending on the density of the multiscale features and shows an ultrafast response time (≈36 µs). The mechanism investigations through the finite element analysis identify the effect of the multiscale structure on the figure-of-merit sensing performance. These unique findings are expected to be of significant relevance to technology that requires higher sensing capability, scalability, and facile adjustment of a sensor geometry in a cost-effective manufacturing manner 
650 4 |a Journal Article 
650 4 |a 3D printing 
650 4 |a chemical vapor deposition 
650 4 |a conductive polymers 
650 4 |a mold-free 
650 4 |a pressure sensors 
650 4 |a ultrafast response 
700 1 |a Shan, Yujie  |e verfasserin  |4 aut 
700 1 |a Mylvaganan, Mitesh  |e verfasserin  |4 aut 
700 1 |a Zhang, Yuxuan  |e verfasserin  |4 aut 
700 1 |a Yang, Xixian  |e verfasserin  |4 aut 
700 1 |a Qin, Fei  |e verfasserin  |4 aut 
700 1 |a Zhao, Kejie  |e verfasserin  |4 aut 
700 1 |a Song, Han Wook  |e verfasserin  |4 aut 
700 1 |a Mao, Huachao  |e verfasserin  |4 aut 
700 1 |a Lee, Sunghwan  |e verfasserin  |4 aut 
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773 1 8 |g volume:35  |g year:2023  |g number:41  |g day:01  |g month:10  |g pages:e2304070 
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