Fabricating SU-8 Photoresist Microstructures with Controlled Convexity-Concavity and Curvature through Thermally Manipulating Capillary Action in Poly(dimethylsiloxane) Microholes

We present a simple, robust, and cheap microfabrication method, based on thermally manipulating capillary action in poly(dimethylsiloxane) (PDMS) microholes, for preparing SU-8 curved microstructures. The microstructure morphology including convexity-concavity and curvature can be controlled via tun...

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Publié dans:	Langmuir : the ACS journal of surfaces and colloids. - 1985. - 39(2023), 2 vom: 17. Jan., Seite 763-770
Auteur principal:	Zhang, Qiushu (Auteur)
Autres auteurs:	Guo, Zhihao, Ma, Zhinan, Wang, Song, Peng, Bei
Format:	Article en ligne
Langue:	English
Publié:	2023
Accès à la collection:	Langmuir : the ACS journal of surfaces and colloids
Sujets:	Journal Article