Readily Accessible Metallic Micro-Island Arrays for High-Performance Metal Oxide Thin-Film Transistors

© 2022 The Authors. Advanced Materials published by Wiley-VCH GmbH.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 34(2022), 45 vom: 15. Nov., Seite e2205871
1. Verfasser: Kim, Jaehyun (VerfasserIn)
Weitere Verfasser: Park, Joon Bee, Zheng, Ding, Kim, Joon-Seok, Cheng, Yuhua, Park, Sung Kyu, Huang, Wei, Marks, Tobin J, Facchetti, Antonio
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2022
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article amorphous indium-gallium-zinc-oxide metal oxide semiconductors metallic capping layers technology computer-aided design simulations thin-film transistors
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520 |a Thin-film transistors using metal oxide semiconductors are essential in many unconventional electronic devices. Nevertheless, further advances will be necessary to broaden their technological appeal. Here, a new strategy is reported to achieve high-performance solution-processed metal oxide thin-film transistors (MOTFTs) by introducing a metallic micro-island array (M-MIA) on top of the MO back channel, where the MO is a-IGZO (amorphous indium-gallium-zinc-oxide). Here Al-MIAs are fabricated using honeycomb cinnamate cellulose films, created by a scalable breath-figure method, as a shadow mask. For IGZO TFTs, the electron mobility (µe ) increases from ≈3.6 cm2 V-1 s-1 to near 15.6 cm2 V-1 s-1 for optimal Al-MIA dimension/coverage of 1.25 µm/51%. The Al-MIA IGZO TFT performance is superior to that of controls using compact/planar Al layers (Al-PL TFTs) and Au-MIAs with the same channel coverage. Kelvin probe force microscopy and technology computer-aided design simulations reveal that charge transfer occurs between the Al and the IGZO channel which is optimized for specific Al-MIA dimensions/surface channel coverages. Furthermore, such Al-MIA IGZO TFTs with a high-k fluoride-doped alumina dielectric exhibit a maximum µe of >50.2 cm2 V-1 s-1 . This is the first demonstration of a micro-structured MO semiconductor heterojunction with submicrometer resolution metallic arrays for enhanced transistor performance and broad applicability to other devices 
650 4 |a Journal Article 
650 4 |a amorphous indium-gallium-zinc-oxide 
650 4 |a metal oxide semiconductors 
650 4 |a metallic capping layers 
650 4 |a technology computer-aided design simulations 
650 4 |a thin-film transistors 
700 1 |a Park, Joon Bee  |e verfasserin  |4 aut 
700 1 |a Zheng, Ding  |e verfasserin  |4 aut 
700 1 |a Kim, Joon-Seok  |e verfasserin  |4 aut 
700 1 |a Cheng, Yuhua  |e verfasserin  |4 aut 
700 1 |a Park, Sung Kyu  |e verfasserin  |4 aut 
700 1 |a Huang, Wei  |e verfasserin  |4 aut 
700 1 |a Marks, Tobin J  |e verfasserin  |4 aut 
700 1 |a Facchetti, Antonio  |e verfasserin  |4 aut 
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773 1 8 |g volume:34  |g year:2022  |g number:45  |g day:15  |g month:11  |g pages:e2205871 
856 4 0 |u http://dx.doi.org/10.1002/adma.202205871  |3 Volltext 
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