Multiple Linear Regression Modeling of Nanosphere Self-Assembly via Spin Coating
Nanosphere lithography employs single- or multilayer self-assembled nanospheres as a template for bottom-up nanoscale patterning. The ability to produce self-assembled nanospheres with minimal packing defects over large areas is critical to advancing applications of nanosphere lithography. Spin coat...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 37(2021), 42 vom: 26. Okt., Seite 12419-12428 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , , |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2021
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article |
| Zusammenfassung: | Nanosphere lithography employs single- or multilayer self-assembled nanospheres as a template for bottom-up nanoscale patterning. The ability to produce self-assembled nanospheres with minimal packing defects over large areas is critical to advancing applications of nanosphere lithography. Spin coating is a simple-to-execute, high-throughput method of nanosphere self-assembly. The wide range of possible process parameters for nanosphere spin coating, however-and the sensitivity of nanosphere self-assembly to these parameters-can lead to highly variable outcomes in nanosphere configuration by this method. Finding the optimum process parameters for nanosphere spin coating remains challenging. This work adopts a design-of-experiments approach to investigate the effects of seven factors-nanosphere wt%, methanol/water ratio, solution volume, wetting time, spin time, maximum revolutions per minute, and ramp rate-on two response variables-percentage hexagonal close packing and macroscale coverage of nanospheres. Single-response and multiple-response linear regression models identify main and two-way interaction effects of statistical significance to the outcomes of both response variables and enable prediction of optimized settings. The results indicate a tradeoff between the high ramp rates required for large macroscale coverage and the need to minimize high shear forces and evaporation rates to ensure that nanospheres properly self-assemble into hexagonally packed arrays |
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| Beschreibung: | Date Revised 26.10.2021 published: Print-Electronic Citation Status PubMed-not-MEDLINE |
| ISSN: | 1520-5827 |
| DOI: | 10.1021/acs.langmuir.1c02057 |