Backside-illuminated scientific CMOS detector for soft X-ray resonant scattering and ptychography

Backside-illuminated scientific CMOS detector for soft X-ray resonant scattering and ptychography

The impressive progress in the performance of synchrotron radiation sources is nowadays driven by the so-called `ultimate storage ring' projects which promise an unprecedented improvement in brightness. Progress on the detector side has not always been at the same pace, especially as far as sof...

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Publié dans:Journal of synchrotron radiation. - 1994. - 27(2020), Pt 6 vom: 01. Nov., Seite 1577-1589
Auteur principal: Desjardins, Kewin (Auteur)
Autres auteurs: Medjoubi, Kadda, Sacchi, Maurizio, Popescu, Horia, Gaudemer, Roland, Belkhou, Rachid, Stanescu, Stefan, Swaraj, Sufal, Besson, Adrien, Vijayakumar, Jaianth, Pautard, Stéphanie, Noureddine, Arafat, Mercère, Pascal, Da Silva, Paulo, Orsini, Fabienne, Menneglier, Claude, Jaouen, Nicolas
Format: Article en ligne
Langue:English
Publié: 2020
Accès à la collection:Journal of synchrotron radiation
Sujets:Journal Article 2D soft X-ray detector X-ray detectors back-illuminated CMOS coherent diffraction ptychography quantum efficiency radiation hardness sCMOS camera soft X-ray scattering
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520 |a The impressive progress in the performance of synchrotron radiation sources is nowadays driven by the so-called `ultimate storage ring' projects which promise an unprecedented improvement in brightness. Progress on the detector side has not always been at the same pace, especially as far as soft X-ray 2D detectors are concerned. While the most commonly used detectors are still based on microchannel plates or CCD technology, recent developments of CMOS (complementary metal oxide semiconductor)-type detectors will play an ever more important role as 2D detectors in the soft X-ray range. This paper describes the capabilities and performance of a camera equipped with a newly commercialized backside-illuminated scientific CMOS (sCMOS-BSI) sensor, integrated in a vacuum environment, for soft X-ray experiments at synchrotron sources. The 4 Mpixel sensor reaches a frame rate of up to 48 frames s-1 while matching the requirements for X-ray experiments in terms of high-intensity linearity (>98%), good spatial homogeneity (<1%), high charge capacity (up to 80 ke-), and low readout noise (down to 2 e- r.m.s.) and dark current (3 e- per second per pixel). Performance evaluations in the soft X-ray range have been carried out at the METROLOGIE beamline of the SOLEIL synchrotron. The quantum efficiency, spatial resolution (24 line-pairs mm-1), energy resolution (<100 eV) and radiation damage versus the X-ray dose (<600 Gy) have been measured in the energy range from 40 to 2000 eV. In order to illustrate the capabilities of this new sCMOS-BSI sensor, several experiments have been performed at the SEXTANTS and HERMES soft X-ray beamlines of the SOLEIL synchrotron: acquisition of a coherent diffraction pattern from a pinhole at 186 eV, a scattering experiment from a nanostructured Co/Cu multilayer at 767 eV and ptychographic imaging in transmission at 706 eV 
650 4 |a Journal Article 
650 4 |a 2D soft X-ray detector 
650 4 |a X-ray detectors 
650 4 |a back-illuminated CMOS 
650 4 |a coherent diffraction 
650 4 |a ptychography 
650 4 |a quantum efficiency 
650 4 |a radiation hardness 
650 4 |a sCMOS camera 
650 4 |a soft X-ray scattering 
700 1 |a Medjoubi, Kadda  |e verfasserin  |4 aut 
700 1 |a Sacchi, Maurizio  |e verfasserin  |4 aut 
700 1 |a Popescu, Horia  |e verfasserin  |4 aut 
700 1 |a Gaudemer, Roland  |e verfasserin  |4 aut 
700 1 |a Belkhou, Rachid  |e verfasserin  |4 aut 
700 1 |a Stanescu, Stefan  |e verfasserin  |4 aut 
700 1 |a Swaraj, Sufal  |e verfasserin  |4 aut 
700 1 |a Besson, Adrien  |e verfasserin  |4 aut 
700 1 |a Vijayakumar, Jaianth  |e verfasserin  |4 aut 
700 1 |a Pautard, Stéphanie  |e verfasserin  |4 aut 
700 1 |a Noureddine, Arafat  |e verfasserin  |4 aut 
700 1 |a Mercère, Pascal  |e verfasserin  |4 aut 
700 1 |a Da Silva, Paulo  |e verfasserin  |4 aut 
700 1 |a Orsini, Fabienne  |e verfasserin  |4 aut 
700 1 |a Menneglier, Claude  |e verfasserin  |4 aut 
700 1 |a Jaouen, Nicolas  |e verfasserin  |4 aut 
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