Journal Article EC 3.2.1.17 Muramidase scanning hard X-ray nanoprobe 2D soft X-ray detector Macromolecular Substances Research Support, Non-U.S. Gov't X-ray detectors X-ray multi-technique imaging back-illuminated CMOS coherent diffraction continuous scan dark field differential phase contrast fluorescence microprobe hierarchical length-scale imaging morphology multimodal techniques phase contrast phase retrieval ptychography quantum efficiency radiation hardness sCMOS camera scanning X-ray tomography scanning multimodal X-ray imaging soft X-ray scattering spectro-microscopy tomographic reconstruction