This article presents a resonant cavity-based array design for piezoelectric micromachined ultrasonic transducers (PMUTs). The cavity depth is designed to ensure that its open end achieves a considerably smaller acoustic impedance than the surrounding PMUT cells. The interference acoustic wave gener...
Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 4 vom: 03. Apr., Seite 789-800
|
|---|
| Auteur principal: |
Xu, Tingzhong
(Auteur) |
|---|
| Autres auteurs: |
Zhao, Libo,
Jiang, Zhuangde,
Guo, Shuaishuai,
Li, Zhikang,
Yang, Ping,
Sun, Lin,
Luo, Guoxi,
Zhang, Liangchi |
|---|
| Format: | Article en ligne
|
|---|
| Langue: | English |
|---|
| Publié: |
2020
|
|---|
| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|
|---|
| Sujets: | Journal Article
Research Support, Non-U.S. Gov't |
|---|