This article presents a resonant cavity-based array design for piezoelectric micromachined ultrasonic transducers (PMUTs). The cavity depth is designed to ensure that its open end achieves a considerably smaller acoustic impedance than the surrounding PMUT cells. The interference acoustic wave gener...
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 4 vom: 03. Apr., Seite 789-800
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| 1. Verfasser: |
Xu, Tingzhong
(VerfasserIn) |
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| Weitere Verfasser: |
Zhao, Libo,
Jiang, Zhuangde,
Guo, Shuaishuai,
Li, Zhikang,
Yang, Ping,
Sun, Lin,
Luo, Guoxi,
Zhang, Liangchi |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2020
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
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