Comparison of Si3N4-SiO2 and SiO2 Insulation Layer for Zero-Bias CMUT Operation Using Dielectric Charging Effects
In this letter, we report the characteristics of zero-bias capacitive micromachined ultrasonic transducers (CMUTs) in various aspects, considering the transmission and reception sensitivity and evaluation of the long-term stability with ac transmission in immersion. The main idea of the zero-bias CM...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 67(2020), 4 vom: 05. Apr., Seite 879-882
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| Auteur principal: |
Choi, Won Young
(Auteur) |
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| Autres auteurs: |
Lee, Chang Hoon,
Kim, Young Hun,
Park, Kwan Kyu |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2020
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article |
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