Diamond nanofocusing refractive X-ray lenses made by planar etching technology

The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360 nm...

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Veröffentlicht in:	Journal of synchrotron radiation. - 1994. - 26(2019), Pt 5 vom: 01. Sept., Seite 1554-1557
1. Verfasser:	Lyubomirskiy, Mikhail (VerfasserIn)
Weitere Verfasser:	Boye, Pit, Feldkamp, Jan M, Patommel, Jens, Schoeder, Sebastian, Schropp, Andreas, Burghammer, Manfred, Wild, Christoph, Schroer, Christian G
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2019
Zugriff auf das übergeordnete Werk:	Journal of synchrotron radiation
Schlagworte:	Journal Article X-ray lenses compound refractive lens (CRL) diamond focusing