Diamond nanofocusing refractive X-ray lenses made by planar etching technology
The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360 nm...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 26(2019), Pt 5 vom: 01. Sept., Seite 1554-1557
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| 1. Verfasser: |
Lyubomirskiy, Mikhail
(VerfasserIn) |
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| Weitere Verfasser: |
Boye, Pit,
Feldkamp, Jan M,
Patommel, Jens,
Schoeder, Sebastian,
Schropp, Andreas,
Burghammer, Manfred,
Wild, Christoph,
Schroer, Christian G |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2019
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
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| Schlagworte: | Journal Article
X-ray lenses
compound refractive lens (CRL)
diamond
focusing |
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