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231225s2018 xx |||||o 00| ||eng c |
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|a 10.1002/ejic.201701225
|2 doi
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|a pubmed24n1002.xml
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|a (NLM)31467483
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|a DE-627
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|e rakwb
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|a eng
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| 100 |
1 |
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|a Nolan, Michelle M
|e verfasserin
|4 aut
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|a Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WNxCy Thin Films
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|c 2018
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
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|2 rdamedia
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|a ƒa Online-Ressource
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|a Date Revised 01.10.2020
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a Tungsten nitrido amido guanidinato complexes of the type WN(NR2)[(NR')2C(NR2)]2 (R = Me, Et; R' = i Pr, Cy) were synthesized as precursors for aerosol-assisted chemical vapor deposition (AACVD) of WNxCy thin films. The reaction of tungsten nitrido amido complexes of the type WN(NR2)3 (R = Me, Et) with two equivalents of a carbodiimide R'N=C=NR' (R' = i Pr, Cy) resulted in two insertions of a carbodiimide into W-N(amido) bonds, affording bis(guanidinato) amido nitrido tungsten complexes. These compounds were characterized by 14N NMR, indicating distinctive chemical shifts for each type of N-bound ligand. Crystallographic structure determination of WN(NMe2)[(N i Pr)2C(NMe2)]2 showed the guanidinato ligands to be non-equivalent. The complex WN(NMe2)[(N i Pr)2C(NMe2)]2 was demonstrated to serve as a precursor for AACVD of WNxCy thin films, resulting in featureless, X-ray amorphous thin films for growth temperatures 200 - 400 °C
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|a Journal Article
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|a chemical vapor deposition
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|a inorganic synthesis
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|a precursor design
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|a thin film
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|a tungsten
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|a Touchton, Alexander J
|e verfasserin
|4 aut
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1 |
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|a Richey, Nathaniel E
|e verfasserin
|4 aut
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| 700 |
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|a Ghiviriga, Ion
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Rocca, James R
|e verfasserin
|4 aut
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1 |
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|a Abboud, Khalil A
|e verfasserin
|4 aut
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1 |
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|a McElwee-White, Lisa
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t European journal of inorganic chemistry
|d 1998
|g 2018(2018), 1 vom: 10. Jan., Seite 46-53
|w (DE-627)NLM098272756
|x 1434-1948
|7 nnns
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| 773 |
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|g volume:2018
|g year:2018
|g number:1
|g day:10
|g month:01
|g pages:46-53
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|u http://dx.doi.org/10.1002/ejic.201701225
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