SyLMAND : a microfabrication beamline with wide spectral and beam power tuning range at the Canadian Light Source
SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices, is a recently commissioned microfabrication bend magnet beamline with ancillary cleanroom facilities at the Canadian Light Source. The synchrotron radiation is applied to pattern high-aspect-ratio polymer microstructures used in the are...
Description complète
Détails bibliographiques
| Publié dans: | Journal of synchrotron radiation. - 1994. - 26(2019), Pt 2 vom: 01. März, Seite 565-570
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| Auteur principal: |
Wells, Garth
(Auteur) |
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| Autres auteurs: |
Achenbach, Sven,
Subramanian, Venkat,
Jacobs, Michael,
Klymyshyn, David,
Iyer, Swathi,
Moazed, Banafsheh,
Hanson, Jack,
Shen, Chen,
Haluzan, Darcy |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2019
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| Accès à la collection: | Journal of synchrotron radiation
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| Sujets: | Journal Article
MEMS
X-ray lithography
beamlines
microfabrication |
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