Ultrathin and Conformal Initiated Chemical-Vapor-Deposited Layers of Systematically Varied Surface Energy for Controlling the Directed Self-Assembly of Block CoPolymers
Directed self-assembly (DSA) of block copolymer (BCP) thin films is a promising approach to enable next-generation patterning at increasingly smaller length scales. DSA utilizes interfacial wetting layers to force the BCP domains to self-assemble with the desired orientation with respect to the subs...
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Détails bibliographiques
| Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 34(2018), 15 vom: 17. Apr., Seite 4494-4502
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| Auteur principal: |
Moni, Priya
(Auteur) |
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| Autres auteurs: |
Suh, Hyo Seon,
Dolejsi, Moshe,
Kim, Do Han,
Mohr, Alan C,
Nealey, Paul F,
Gleason, Karen K |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2018
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| Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids
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| Sujets: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S. |
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