X-ray-induced Cu deposition and patterning on insulators at room temperature

X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electr...

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Veröffentlicht in:	Journal of synchrotron radiation. - 1994. - 22(2015), 6 vom: 11. Nov., Seite 1524-7
1. Verfasser:	Hsu, Pei-Cheng (VerfasserIn)
Weitere Verfasser:	Chen, Yu-Sheng, Hwu, Yeukuang, Je, J H, Margaritondo, G, Tok, Eng Soon
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2015
Zugriff auf das übergeordnete Werk:	Journal of synchrotron radiation
Schlagworte:	Journal Article Research Support, Non-U.S. Gov't X-ray synthesis copper seed layer electroless plating micro-patterning