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231224s2015 xx |||||o 00| ||eng c |
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|a 10.1107/S1600577515015234
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|a eng
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|a Hsu, Pei-Cheng
|e verfasserin
|4 aut
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|a X-ray-induced Cu deposition and patterning on insulators at room temperature
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|c 2015
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|a Text
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|a ƒaComputermedien
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|a Date Completed 03.02.2016
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|a Date Revised 18.04.2016
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers
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|a Journal Article
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|a Research Support, Non-U.S. Gov't
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|a X-ray synthesis
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|a copper seed layer
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|a electroless plating
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|a micro-patterning
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|a Chen, Yu-Sheng
|e verfasserin
|4 aut
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|a Hwu, Yeukuang
|e verfasserin
|4 aut
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|a Je, J H
|e verfasserin
|4 aut
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|a Margaritondo, G
|e verfasserin
|4 aut
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|a Tok, Eng Soon
|e verfasserin
|4 aut
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|i Enthalten in
|t Journal of synchrotron radiation
|d 1994
|g 22(2015), 6 vom: 11. Nov., Seite 1524-7
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|x 1600-5775
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|g volume:22
|g year:2015
|g number:6
|g day:11
|g month:11
|g pages:1524-7
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