On the characterization of ultra-precise X-ray optical components : advances and challenges in ex situ metrology
To fully exploit the ultimate source properties of the next-generation light sources, such as free-electron lasers (FELs) and diffraction-limited storage rings (DLSRs), the quality requirements for gratings and reflective synchrotron optics, especially mirrors, have significantly increased. These co...
Ausführliche Beschreibung
Bibliographische Detailangaben
Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 21(2014), Pt 5 vom: 29. Sept., Seite 968-75
|
1. Verfasser: |
Siewert, F
(VerfasserIn) |
Weitere Verfasser: |
Buchheim, J,
Zeschke, T,
Störmer, M,
Falkenberg, G,
Sankari, R |
Format: | Online-Aufsatz
|
Sprache: | English |
Veröffentlicht: |
2014
|
Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation
|
Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
NOM
X-ray optics
focusing mirrors
metrology for synchrotron optics
multilayer
slope measurement
synchrotron optics |