Characteristics of surface acoustic waves excited by (1120) ZnO films deposited on R-sapphire substrates
(1120)-textured ZnO films are deposited on Rsapphire substrate by RF magnetron sputtering and the effects of deposition conditions on ZnO films are investigated. The chemical compositions of the ZnO films are characterized by X-ray photoelectron spectroscopy and the results indicate that the ratio o...
Description complète
Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 6 vom: 15. Juni, Seite 1213-8
|
|---|
| Auteur principal: |
Wang, Yan
(Auteur) |
|---|
| Autres auteurs: |
Zhang, Shu-yi,
Fan, Li,
Shui, Xiu-ji,
Zhang, Zhong-ning,
Wasa, Kiyotaka |
|---|
| Format: | Article en ligne
|
|---|
| Langue: | English |
|---|
| Publié: |
2013
|
|---|
| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|
|---|
| Sujets: | Journal Article
Research Support, Non-U.S. Gov't |
|---|