Characteristics of surface acoustic waves excited by (1120) ZnO films deposited on R-sapphire substrates
(1120)-textured ZnO films are deposited on Rsapphire substrate by RF magnetron sputtering and the effects of deposition conditions on ZnO films are investigated. The chemical compositions of the ZnO films are characterized by X-ray photoelectron spectroscopy and the results indicate that the ratio o...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 6 vom: 15. Juni, Seite 1213-8
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| 1. Verfasser: |
Wang, Yan
(VerfasserIn) |
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| Weitere Verfasser: |
Zhang, Shu-yi,
Fan, Li,
Shui, Xiu-ji,
Zhang, Zhong-ning,
Wasa, Kiyotaka |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
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