Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators
Elastic constants c11, c12, and c44 of degenerately doped silicon are studied experimentally as a function of the doping level and temperature. First-and second-order temperature coefficients of the elastic constants are extracted from measured resonance frequencies of a set of MEMS resonators fabri...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 61(2014), 7 vom: 23. Juli, Seite 1063-74
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| 1. Verfasser: |
Jaakkola, Antti
(VerfasserIn) |
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| Weitere Verfasser: |
Prunnila, Mika,
Pensala, Tuomas,
Dekker, James,
Pekko, Panu |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2014
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
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