Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

von Jaakkola, Antti
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2014)

Experimental investigation of acoustic substrate losses in 1850-MHz thin film BAW resonators

von Pensala, Tuomas
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2009)