Design and simulation of coupled-resonator filters using periodically slotted electrodes on FBARs

This paper discusses the use of periodically slotted top electrodes in the film bulk acoustic resonator (FBAR) structure for the realization of wideband coupled-resonator filters (CRFs), where evanescent modes in the periodic structure are used for the coupling between adjacent electrodes. First, wa...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 61(2014), 5 vom: 11. Mai, Seite 881-5
1. Verfasser: Liu, Jiansong (VerfasserIn)
Weitere Verfasser: Omori, Tatsuya, Ahn, Changjun, Hashimoto, Ken-ya
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2014
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Letter Research Support, Non-U.S. Gov't
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520 |a This paper discusses the use of periodically slotted top electrodes in the film bulk acoustic resonator (FBAR) structure for the realization of wideband coupled-resonator filters (CRFs), where evanescent modes in the periodic structure are used for the coupling between adjacent electrodes. First, wave propagation in this structure is investigated. Finite element analysis is performed for the Mo/ZnO/Mo structure. The result suggests that lateral wave propagation is controlled by the Bragg reflection, and that transverse modes can be suppressed when the structure is properly designed. Next, a CRF is designed. It is shown that wideband CRFs are realizable when the period, thickness, and width of slotted electrodes are properly set 
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650 4 |a Research Support, Non-U.S. Gov't 
700 1 |a Omori, Tatsuya  |e verfasserin  |4 aut 
700 1 |a Ahn, Changjun  |e verfasserin  |4 aut 
700 1 |a Hashimoto, Ken-ya  |e verfasserin  |4 aut 
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