Design and simulation of coupled-resonator filters using periodically slotted electrodes on FBARs
This paper discusses the use of periodically slotted top electrodes in the film bulk acoustic resonator (FBAR) structure for the realization of wideband coupled-resonator filters (CRFs), where evanescent modes in the periodic structure are used for the coupling between adjacent electrodes. First, wa...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 61(2014), 5 vom: 11. Mai, Seite 881-5
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| 1. Verfasser: |
Liu, Jiansong
(VerfasserIn) |
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| Weitere Verfasser: |
Omori, Tatsuya,
Ahn, Changjun,
Hashimoto, Ken-ya |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2014
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Letter
Research Support, Non-U.S. Gov't |
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