Closed batch initiated chemical vapor deposition of ultrathin, functional, and conformal polymer films
A modified fabrication process based on initiated chemical vapor deposition (iCVD) has been developed for producing ultrathin and uniform polymer films. This so-called "closed batch" (CB) iCVD process provides fine-tuning of the thickness and deposition rate of polymeric materials while us...
| Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 30(2014), 16 vom: 29. Apr., Seite 4830-7 |
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| Auteur principal: | |
| Autres auteurs: | , |
| Format: | Article en ligne |
| Langue: | English |
| Publié: |
2014
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| Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids |
| Sujets: | Journal Article |
| Accès en ligne |
Volltext |