Closed batch initiated chemical vapor deposition of ultrathin, functional, and conformal polymer films
A modified fabrication process based on initiated chemical vapor deposition (iCVD) has been developed for producing ultrathin and uniform polymer films. This so-called "closed batch" (CB) iCVD process provides fine-tuning of the thickness and deposition rate of polymeric materials while us...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 30(2014), 16 vom: 29. Apr., Seite 4830-7 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2014
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article |
| Online verfügbar |
Volltext |