High-frequency (>50 MHz) medical ultrasound linear arrays fabricated from micromachined bulk PZT materials

This paper describes the development and characterization of a high-frequency (65-MHz) ultrasound transducer linear array. The array was built from bulk PZT which was etched using an optimized chlorine-based plasma dry-etching process. The median etch rate of 8 µ m/h yielded a good profile (wall) an...

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Détails bibliographiques

Publié dans:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 59(2012), 2 vom: 28. Feb., Seite 315-8
Auteur principal:	Liu, Changgeng (Auteur)
Autres auteurs:	Zhou, Qifa, Djuth, Frank T, Shung, K Kirk
Format:	Article en ligne
Langue:	English
Publié:	2012
Accès à la collection:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Sujets:	Letter Research Support, N.I.H., Extramural lead titanate zirconate 12626-81-2 Lead 2P299V784P Zirconium C6V6S92N3C Titanium D1JT611TNE