High-frequency (>50 MHz) medical ultrasound linear arrays fabricated from micromachined bulk PZT materials
This paper describes the development and characterization of a high-frequency (65-MHz) ultrasound transducer linear array. The array was built from bulk PZT which was etched using an optimized chlorine-based plasma dry-etching process. The median etch rate of 8 µ m/h yielded a good profile (wall) an...
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Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 59(2012), 2 vom: 13. Feb., Seite 315-8
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| 1. Verfasser: |
Liu, Changgeng
(VerfasserIn) |
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| Weitere Verfasser: |
Zhou, Qifa,
Djuth, Frank T,
Shung, K Kirk |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2012
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Letter
Research Support, N.I.H., Extramural
lead titanate zirconate
12626-81-2
Lead
2P299V784P
Zirconium
C6V6S92N3C
Titanium
D1JT611TNE |
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