Three-wave X-ray diffraction in distorted epitaxial structures

Three-wave diffraction has been measured for a set of GaN, AlN, AlGaN and ZnO epitaxial layers grown on c-sapphire. A Renninger scan for the primary forbidden 0001 reflection was used. For each of the three-wave combinations, θ-scan curves were measured. The intensity and angular width of both ϕ- an...

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Bibliographische Detailangaben
Veröffentlicht in:Journal of applied crystallography. - 1998. - 46(2013), Pt 4 vom: 01. Aug., Seite 861-867
1. Verfasser: Kyutt, Reginald (VerfasserIn)
Weitere Verfasser: Scheglov, Mikhail
Format: Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Journal of applied crystallography
Schlagworte:Journal Article X-ray diffraction epitaxial layers multiple diffraction structural defects wurtzite structure