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231224s2013 xx |||||o 00| ||eng c |
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|a 10.1107/S0909049513009102
|2 doi
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|a pubmed24n0761.xml
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|a DE-627
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|a eng
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|a Sønsteby, Henrik Hovde
|e verfasserin
|4 aut
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|a On the application of a single-crystal κ-diffractometer and a CCD area detector for studies of thin films
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|c 2013
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
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|2 rdamedia
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|a ƒa Online-Ressource
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|a Date Completed 06.01.2014
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|a Date Revised 14.06.2013
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a A multipurpose six-axis κ-diffractometer, together with the brilliance of the ESRF light source and a CCD area detector, has been explored for studying epitaxial relations and crystallinity in thin film systems. The geometrical flexibility of the six-axis goniometer allows measurement of a large volume in reciprocal space, providing an in-depth understanding of sample crystal relationships. By a set of examples of LaAlO3 thin films deposited by the atomic layer deposition technique, the possibilities of the set-up are presented. A fast panoramic scan provides determination of the crystal orientation matrices, prior to more thorough inspection of single Bragg nodes. Such information, in addition to a broadening analysis of families of single reflections, is shown to correlate well with the crystallinity, crystallite size, strain and epitaxial relationships in the thin films. The proposed set-up offers fast and easy sample mounting and alignment, along with crucial information on key features of the thin film structures
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|a Journal Article
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|a epitaxial thin films
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|a six-axis κ-diffractometer
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|a synchrotron X-ray diffraction
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|a Chernyshov, Dmitry
|e verfasserin
|4 aut
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|a Getz, Michael
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Nilsen, Ola
|e verfasserin
|4 aut
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|a Fjellvåg, Helmer
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t Journal of synchrotron radiation
|d 1994
|g 20(2013), Pt 4 vom: 07. Juli, Seite 644-7
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|x 1600-5775
|7 nnns
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| 773 |
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|g volume:20
|g year:2013
|g number:Pt 4
|g day:07
|g month:07
|g pages:644-7
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|u http://dx.doi.org/10.1107/S0909049513009102
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