Stepwise molding, etching, and imprinting to form libraries of nanopatterned substrates

Herein, we describe a novel colloidal lithographic strategy for the stepwise patterning of planar substrates with numerous complex and unique designs. In conjunction with colloidal self-assembly, imprint molding, and capillary force lithography, reactive ion etching was used to create complex librar...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 29(2013), 22 vom: 04. Juni, Seite 6737-45
1. Verfasser: Zhao, Zhi (VerfasserIn)
Weitere Verfasser: Cai, Yangjun, Liao, Wei-Ssu, Cremer, Paul S
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article Research Support, Non-U.S. Gov't Research Support, U.S. Gov't, Non-P.H.S. Colloids Dimethylpolysiloxanes Polystyrenes baysilon 63148-62-9 Gold 7440-57-5
LEADER 01000naa a22002652 4500
001 NLM227581660
003 DE-627
005 20231224074022.0
007 cr uuu---uuuuu
008 231224s2013 xx |||||o 00| ||eng c
024 7 |a 10.1021/la400943j  |2 doi 
028 5 2 |a pubmed24n0758.xml 
035 |a (DE-627)NLM227581660 
035 |a (NLM)23682850 
040 |a DE-627  |b ger  |c DE-627  |e rakwb 
041 |a eng 
100 1 |a Zhao, Zhi  |e verfasserin  |4 aut 
245 1 0 |a Stepwise molding, etching, and imprinting to form libraries of nanopatterned substrates 
264 1 |c 2013 
336 |a Text  |b txt  |2 rdacontent 
337 |a ƒaComputermedien  |b c  |2 rdamedia 
338 |a ƒa Online-Ressource  |b cr  |2 rdacarrier 
500 |a Date Completed 31.12.2013 
500 |a Date Revised 05.06.2013 
500 |a published: Print-Electronic 
500 |a Citation Status MEDLINE 
520 |a Herein, we describe a novel colloidal lithographic strategy for the stepwise patterning of planar substrates with numerous complex and unique designs. In conjunction with colloidal self-assembly, imprint molding, and capillary force lithography, reactive ion etching was used to create complex libraries of nanoscale features. This combinatorial strategy affords the ability to develop an exponentially increasing number of two-dimensional nanoscale patterns with each sequential step in the process. Specifically, dots, triangles, circles, and lines could be assembled on the surface separately and in combination with each other. Numerous architectures are obtained for the first time with high uniformity and reproducibility. These hexagonal arrays were made from polystyrene and gold features, whereby each surface element could be tuned from the micrometer size scale down to line widths of ~35 nm. The patterned area could be 1 cm(2) or even larger. The techniques described herein can be combined with further steps to make even larger libraries. Moreover, these polymer and metal features may prove useful in optical, sensing, and electronic applications 
650 4 |a Journal Article 
650 4 |a Research Support, Non-U.S. Gov't 
650 4 |a Research Support, U.S. Gov't, Non-P.H.S. 
650 7 |a Colloids  |2 NLM 
650 7 |a Dimethylpolysiloxanes  |2 NLM 
650 7 |a Polystyrenes  |2 NLM 
650 7 |a baysilon  |2 NLM 
650 7 |a 63148-62-9  |2 NLM 
650 7 |a Gold  |2 NLM 
650 7 |a 7440-57-5  |2 NLM 
700 1 |a Cai, Yangjun  |e verfasserin  |4 aut 
700 1 |a Liao, Wei-Ssu  |e verfasserin  |4 aut 
700 1 |a Cremer, Paul S  |e verfasserin  |4 aut 
773 0 8 |i Enthalten in  |t Langmuir : the ACS journal of surfaces and colloids  |d 1992  |g 29(2013), 22 vom: 04. Juni, Seite 6737-45  |w (DE-627)NLM098181009  |x 1520-5827  |7 nnns 
773 1 8 |g volume:29  |g year:2013  |g number:22  |g day:04  |g month:06  |g pages:6737-45 
856 4 0 |u http://dx.doi.org/10.1021/la400943j  |3 Volltext 
912 |a GBV_USEFLAG_A 
912 |a SYSFLAG_A 
912 |a GBV_NLM 
912 |a GBV_ILN_22 
912 |a GBV_ILN_350 
912 |a GBV_ILN_721 
951 |a AR 
952 |d 29  |j 2013  |e 22  |b 04  |c 06  |h 6737-45