Stepwise molding, etching, and imprinting to form libraries of nanopatterned substrates
Herein, we describe a novel colloidal lithographic strategy for the stepwise patterning of planar substrates with numerous complex and unique designs. In conjunction with colloidal self-assembly, imprint molding, and capillary force lithography, reactive ion etching was used to create complex librar...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 29(2013), 22 vom: 04. Juni, Seite 6737-45
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| 1. Verfasser: |
Zhao, Zhi
(VerfasserIn) |
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| Weitere Verfasser: |
Cai, Yangjun,
Liao, Wei-Ssu,
Cremer, Paul S |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
Research Support, U.S. Gov't, Non-P.H.S.
Colloids
Dimethylpolysiloxanes
Polystyrenes
baysilon
63148-62-9
Gold
7440-57-5 |
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