Correlation between propagation loss and silicon dioxide film properties for surface acoustic wave devices
The correlation between the propagation loss and SiO2 film properties has been studied for temperature-compensated SAW devices using the SiO2/LiNbO3 structure. The SAW devices were prepared under different deposition temperatures for SiO2 film. Although they possessed excellent temperature coefficie...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 60(2013), 5 vom: 21. Mai, Seite 993-7
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| 1. Verfasser: |
Matsuda, Satoru
(VerfasserIn) |
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| Weitere Verfasser: |
Miura, Michio,
Matsuda, Takashi,
Ueda, Masanori,
Satoh, Yoshio,
Hashimoto, Ken-Ya |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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